Xinnovis Factory Mfc-500 Explosion Proof Gas Mass Flow Controller Equipped With Special Host Computer

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Product Description

 

The perfect combination of a new generation of industrial-grade flow sensor chip and advanced gas circuit structure

 

The S500 series products adopt the industrial-grade advanced flow sensor chip independently developed by the company, combined with the low-voltage loss gas circuit structure, high-speed digital processing circuit and temperature compensation algorithm, and can realize the rapid control of gas flow within the minimum 0.1sccm and maximum 200slm flow range. Each product is subject to strict temperature compensation, and the error is less than 1% within 0-50 ℃. The product can be equipped with touch screen and independent power supply port, which is perfectly suitable for various application environments such as semiconductor, vacuum coating, laboratory, photovoltaic, analyzer, laboratory, etc.

 

Advantages

 

S1 Dual screen display

 

S2 Support range adjustment

 

S3 Quick response

 

S4  High precision

 

SEquipped with special host computer

 

S6 Certified product

 

Parameters

Requirements

Clean,dry and non-corrosive

Gas type

Air,N2,O2,Co2,He,H2,CH4,Ar,etc.

Full scale

(0-10,20,50,100,200,500)sccm

(0-1,2,5,10,20,50,100,200)slm

Accuracy

0.3%F.S (≤30%F.S.)

1.0%S.P.(>30%F.S.)

Range ratio

100:1

Response time

≤0.5s

Repetition accuracy

±0.2%F.S.

resolution ratio

≤20sccm,0.001sccm

≤100sccm and>20sccm,0.01sccm

≤1000sccm and>100sccm,0.1sccm

≤50slm and>1000sccm,1sccm

>50slm,0.001slm

Leakage rate

1*10^9pa m³/s He

Max.withstand pressure

9.8bar

Environmental requirements

Operating temp.

0-50℃

Operating humidity

10%~90%R.H.(No ice or frost)

Operating pressure

≥2slm,0.5-4bar

<2slm,0.5-6bar (Specific range related)

Storage temp.

-20~85℃

 

 

Electric parameters

Power voltage

DC24v

Power consumption

≤4.0w

Starting time

<1s

Communication interface

Interface type

D-SUB9,RJ45

Analog control

0~5v or 4~20mA

Digital control

RS485 or RS232

Digital signal(RS485)

Interface type

D-SUB9,RJ45

Traffic rate

9600,38400,115200(Default)(can be modified through command or upper computer)

Protocol

Modbus-RTU

(Private protocols can be customized)

Equipment Address

1(Default)~99

(can be modified through command or upper computer)

Mechanical parameters

Connector type

Card sleeve: 1/4inch

VCR:1/4inch

Others are optional.

Gas connect material

316L Stainless steel,

FKM rubber,Si,SiO2,Silica gel

Main material

Foundation:316L Stainless steel

Shell:Aluminum alloy

Sealing material

FKM rubber

Weight

0.95kg

 

 

Packaging & Shipping

 

Our Services

 

 

Company Information

 

 

Website: http://en.xinnovis.com/

 

   Qingdao Xinnovis Microsystem Technology Co., Ltd. is a high-tech enterprise specializing in industrial intelligent sensor chip design, module development, and high-end metering instrument R&D, manufacturing and sales. The company is located in Qingdao International Innovation Park, Laoshan District, Qingdao, adjacent to Shandong University (Qingdao Campus), Ocean University of China, Beihang Institute of Microelectronics, Lanhua Institute of Chinese Academy of Sciences (Qingdao), Qingdao University and other famous universities.

   At present, the company focuses on the research and development, manufacturing and sales of gas flow measurement and control chips and modules such as industrial-grade gas flow sensor chips, high-end gas mass flow meters (MFM), mass flow controllers (MFC), and miniature digital anemometers. Through joint strategic partners, it has the world's first-class sensor wafer manufacturing capabilities, and has a 9,000-square-meter packaging and testing workshop, with IS09001, IS014001, 1ATF16949 and other quality management and manufacturing certifications. Related products are widely used in special gas fields such as semiconductors, gas analyzers, brazing/argon arc welding, metrology institutes, laboratories, etc., as well as civil fields such as building ventilation and automobiles. At the same time, the company provides solutions and technology development services for low-power dedicated smart sensors through cooperation with domestic artificial intelligence chip design companies.

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